基本释义:

同轴圆筒型等离子体增强型

网络释义

1)coaxial cylindrical plasma enhanced CVD system,同轴圆筒型等离子体增强型

2)plasma enhanced MOCVD,等离子体增强型MOCVD

3)plasma enhanced CVD systemECR,等离子体增强型CVD 系统

4)microwave plasma enhanced CVD system,微波等离子体增强型

5)high density plasma enhanced,高密度等离子体增强型

6)barrel type plasma etching system,圆筒型等离子体蚀刻系统

用法和例句

The as grown, ZnO films annealed after growth and annealed during growth(denoted as S1, S2 and S3, respectively) were grown on C plane sapphire substrate by plasma enhanced MOCVD and characterized by XRD and X ray photoelectron energy spectra.

利用等离子体增强型MOCVD设备 ,在C面蓝宝石上生长出了C轴取向的未退火、生长后一次退火和生长过程中多次退火的ZnO薄膜样品 ,并通过X光衍射和X光电子能谱对样品进行了表征 ,结果表明生长过程中多次退火的样品具有较高的质量 ,O/Zn原子比较大 ,且受空气中氧和水汽的影响最小。