»ù±¾ÊÍÒå:

ԲͲÐη´Ó¦ÆÚµÈÀë×Ó¸¯Ê´

ÍøÂçÊÍÒå

1)barrel reactor plasma etching,ԲͲÐη´Ó¦ÆÚµÈÀë×Ó¸¯Ê´

2)reactive ion etch and plasma etch,·´Ó¦Àë×Ó¸¯Ê´ºÍµÈÀë×Ó¸¯Ê´

3)RIE,·´Ó¦Àë×Ó¸¯Ê´

4)cylindrical plasma reactor,Ô²ÖùÐεÈÀë×ÓÌå·´Ó¦Æ÷

5)plasma etching,µÈÀë×Ó¸¯Ê´

6)the plasma corroding,µÈÀë×ÓÌ帯ʴ

Ó÷¨ºÍÀý¾ä

A new way of using reactive ion etch and plasma etch to make sharpª²tips for vacuum pressure sensor is presented in this paper.

Ö÷Òª½éÉÜÀûÓ÷´Ó¦Àë×Ó¸¯Ê´ºÍµÈÀë×Ó¸¯Ê´Ïà½áºÏµÄ·½·¨ÖÆ×÷Õæ¿Õ΢µç×ÓѹÁ¦´«¸ÐÆ÷ÖÐ׶¼âÕóÁС£

RIE and the Application in the VLSI Failure Analysis Field;

·´Ó¦Àë×Ó¸¯Ê´¼°ÆäÔÚVLSIʧЧ·ÖÎöÖеÄÓ¦ÓÃ

barrel reactor plasma etching

ԲͲÐη´Ó¦ÆÚµÈÀë×Ó¸¯Ê´

Electrochemical corrosion behavior of reactive plasma-sprayed TiN coatings

·´Ó¦µÈÀë×ÓÅçÍ¿TiNÍ¿²ãµç»¯Ñ§¸¯Ê´ÐÐΪ

multiwafer plasma reactor

¶àԲƬµÈÀë×ÓÌå·´Ó¦Æ÷

planar plasma reactor

ƽÃæʽµÈÀë×ÓÌ帯ʴÆ÷

radical plasma etching

×ÔÓÉ»ùµÈÀë×ÓÌ帯ʴ

Behaviour of Ar~+ Ion in Reactive Ion Etching of ¢ó-¢õ Compound

ë²Àë×ÓÔÚ·´Ó¦Àë×Ó¸¯Ê´¢ó-¢õ×å²ÄÁÏÖеÄ×÷ÓÃ

radial flow plasma etching reactor

¾¶ÏòÁ½µÈÀë×ÓÌ帯ʴװÖÃ

parallel plate plasma etcher

ƽÐаåµÈÀë×ÓÌ帯ʴװÖÃ

Fractal Behavior and Elliptic Flow Effect in Heavy Ion Reactions

ÖØÀë×Ó·´Ó¦ÖеķÖÐÎÐÐΪºÍÍÖÔ²Á÷ЧӦ

The failure of the hollow cylinder roller bearing is stress corrosion wearing.

¿ÕÐÄÔ²Öù¹ö×ÓÖá³ÐΪӦÁ¦¸¯Ê´Ä¥ËðʧЧ¡£

Study on Corrosion and Structure about the Reacting Kettle's Inner Vessel and Its Appurtenace of Producing Nitric Acid Using Direct Method;

Ö±Ïõ·¨Éú²úŨÏõËá·´Ó¦¸ªÄÚͲ¼°¸½¼þµÄ¸¯Ê´ºÍ½á¹¹µÄÑо¿

Corrosion resistance of Al/Al_2O_3 coating prepared by plasma spraying on magnesium alloy

þºÏ½ðµÈÀë×ÓÅçÍ¿Al/Al_2O_3Í¿²ãµÄÄ͸¯Ê´ÐÔÄÜ

Hot Corrorion Behavior of the Air Plasma Spraying Yttria-stabilized Zirconia Coating

µÈÀë×ÓÅçÍ¿YSZÈÈÕÏÍ¿²ãµÄÈȸ¯Ê´ÐÐΪÑо¿

Anticorrosion Properties of Pure Titanium by Means of Plasma Nitriding Technique

µÈÀë×ÓÉøµª¶Ô´¿îÑÄ͸¯Ê´ÐÔÄÜÓ°ÏìµÄÑо¿

cylindrical grate ball mill

¸ñ×ÓʽԲͲÐÎÇòÄ¥»ú

Beer cans are cylindrical.

Æ¡¾Æ¹Þ×ÓÊÇԲͲÐεġ£

Inductively coupled plasma reactive ion etching of InSb photovoltaic detector arrays

InSbÕóÁÐ̽²âоƬµÄ¸ÐÓ¦ñîºÏµÈÀë×Ó·´Ó¦¿ÌÊ´Ñо¿

magnetron ion etcher

´Å¿Ø¹ÜÀë×Ó¸¯Ê´×°ÖÃ