基本释义:

圆缺孔板

网络释义

1)segment shadow mask,圆缺孔板

2)wafer notch,晶圆缺口

3)notched roll collar,圆缺嘴领

4)yield modeling,圆缺陷模型

5)elliptical defect model,椭圆缺陷模型

6)single-segmented,单圆缺受力状态

用法和例句

There are some disadvantages of the method,based on laser diode and receiver,to detect the wafer notch,such as low mission success rate,long detecting time,complex machine structure and so on.

针对采用激光二极管和接收器检测晶圆缺口时存在的一次检测成功率低、检测时间长和机械结构复杂等缺点,为了缩短单片晶圆检测时间,提高晶圆搬运机的效率,本文提出了一种基于线阵CCD的检测方法。