基本释义:

紫外线光刻

网络释义

1)ultraviolet lithography,紫外线光刻

2)deep uv lithography,远紫外线光刻

3)UV-lithography,紫外光刻

4)UV lithography,紫外光刻

5)Extreme ultraviolet lithography (EUVL),极紫外线投影光刻

6)extreme ultraviolet lithography,极端远紫外线光刻

用法和例句

CaF2 crystal with broad wavelength range and high transmittance has become the focus of the semiconductor industry with the development of UV-lithography.

随着深紫外光刻技术的发展,透光范围宽、透过率高的CaF_2晶体成了人们关注的焦点,其尺寸和质量得到了不断的提高。

A UV-exposure model and a dimensional tolerance model based on Fresnel diffraction theory are established by considering the impact of the refractive index and absorption coefficient of SU-8 photoresist on dimensional precision of UV-lithography.

在考虑了SU-8的吸收系数和折射系数对紫外光刻尺寸精度影响的基础上,根据菲涅耳衍射理论建立了紫外曝光改进模型和尺寸公差模型,对SU-8微结构的尺寸及其公差进行数值模拟。

The deep UV-lithography is one of the main processing technique of high aspect ratio microstructure fabrication.

UV-LIGA技术是制作大高宽比微电子机械(MEMS)的方法之一,而UV-LIGA技术的关键工艺之一为深度紫外光刻。

The pattern transfer accuracy of deep UV lithography is investigated.

由于紫外光衍射效应比较大 ,通过紫外光刻获得高精度的大高度微结构并不容易。

To study the relationship between the shape errors of photo-resist model based on UV lithography and processing parameters,the orthogonal experimentation was employed to design and organize the experiment for positive photo-resist AZ9260.

为研究基于紫外光刻加工技术的光刻胶模型形状误差与工艺参数的关系,利用正交实验法对正性光刻胶AZ9260进行了实验研究。

Research of Focus Optical System Used in Ultraviolet Photolithography;

用于紫外光刻的聚焦光学系统的研究

Development of a High ThermoStability UV Positive Photoresist and a 248nm Deep-UV Photoresist;

耐高温紫外正型光刻胶和248nm深紫外光刻胶的研制

Thermal Deformation of EUV Mask and its Influence on Lithographic Performance;

极紫外光刻掩模热变形及其对光刻性能的影响

Research on Theory and Experiment of UV-Lithography on SU-8 Photoresist;

SU-8胶紫外光刻理论与实验研究

Research on Precise Mechanism and Related Control Technologies of Euvl Stage;

极紫外光刻机工件台精密机械及控制相关技术

Research of SU-8 Resist Lithography Using Ultraviolet Laser;

紫外激光曝光光刻SU-8胶的工艺研究

Study on Key Technologies in UV-LED Fiber Lithography System

紫外LED光纤光刻系统关键技术研究

Investigation on Extreme Ultraviolet Lithography;

极紫外投影光刻中若干关键技术研究

Study of a UV Positive Photoresist and Photoacid Generators for 248nm Deep-UV Photoresist;

紫外正型光刻胶及248nm产酸剂的研制

Two-mirror system design study of reduced projection optics for EUV Lithography;

极紫外投影光刻两镜微缩投影系统的光学设计

Optical head supporting sub wavelength structure with UV interference lithography

支持亚波长结构光刻的紫外干涉光学头

Numerical analysis and measurement of stray light from UV ruled gratings

紫外平面刻划光栅杂散光数值分析及测试

Ultraviolet light or the ultraviolet part of the spectrum.

紫外光，紫外线的紫外光或光谱的紫外线部分

Vacuum-ultraviolet Blazed Silicon Gratings Anisotropically Wet-etched by a Native-oxide Mask

利用天然氧化层掩模的真空紫外硅闪耀光栅的湿法刻蚀制作

UV-visible spectrophotometer

紫外-可见光分光光度计

ultra-violet and visible spectrophotometer

紫外可见光分光光度计

ultraviolet spectrophotometry

紫外线分光光度测定法

ultraviolet absorption spectrophotometry

紫外吸收分光光度学