基本释义:

自动掩模对准器

网络释义

1)automask aligner,自动掩模对准器

2)mask aligner,掩模对准器

3)mask alignment,掩模对准<测>

4)submicron mask aligner,亚微米掩模对准器

5)buried metal self-align,掩埋金属自对准

6)Mask aligners,掩模对准系统

用法和例句

With the novel modulated doping QW base and buried metal self-align process, the base lateral resistance and contact resistance of ultra-thin-base small-size SiGe HBTs are decreased by 42% and 55% respectively, which provides an effective method of resolution on base serial resistance.

采用新型调制掺杂量子阱基区结构和掩埋金属自对准工艺方法,在器件的纵向结构和制备手段上同时进行改进,使超薄基区小尺寸SiGeHBT的基区横向电阻和接触电阻分别降低42%和55%以上,有效解决了基区串联电阻的问题。