基本释义:

晶圆加热机构

网络释义

1)wafer heating mechanism,晶圆加热机构

2)wafer group closing mechanism,晶圆群靠拢机构

3)single wafer processing cleaner,单晶圆加工洗涤机

4)heated circular plate,加热圆板

5)plate heating cylindrical dryer,板式加热圆筒干燥机

6)heated crystallization,加热晶化